SOLUTION
Electronics
Dust adhering to worker are removed over 90%, brought dust number is reduced
Case study of a silicon manufacturing plant of an chemical company
| At a semiconductor materials plant of a general chemical manufacturer, there was a problem with foreign objects being brought into the work area. In the inspection and measurement area for silicon materials, contamination by foreign objects must be avoided to ensure quality, but the existing air shower installed in the building was not able to remove foreign objects from the workers. To solve this problem, TRINC ION AIR SHOWER KIT was installed in front of the work area in the cleanroom to clean again worker just before work. The TRINC ION AIR SHOWER KIT is easily transportable with casters and does not spill foreign matter into the surrounding environment, making it possible to clean the work area in the cleanroom immediately before the work area, which was not possible with the conventional air shower. |
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A test to measure the dust removal capability confirmed that more than 90% of the foreign matter on the work clothes was removed. On the other hand, using an existing air shower, a clear difference in dust ramoval capacity was confirmed, with most dust remaining on the clothes.
Since the number of foreign matter defects in the inspection and measurement areas were reduced, a plan to introduce this equipment to other processes is in progress. Since the system does not require installation work and can be operated at any desired location, it has been well received by our customers, who have come up with a series of new scenes of utilization that are different from those of conventional air showers.
Since the number of foreign matter defects in the inspection and measurement areas were reduced, a plan to introduce this equipment to other processes is in progress. Since the system does not require installation work and can be operated at any desired location, it has been well received by our customers, who have come up with a series of new scenes of utilization that are different from those of conventional air showers.
